Noise Analysis and Noise-based Optimization for Resonant MEMS Structures
نویسندگان
چکیده
This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.
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عنوان ژورنال:
- CoRR
دوره abs/0805.0927 شماره
صفحات -
تاریخ انتشار 2008